MIM capacitors with HfO2 and HfAlOx for Si RF and analog applications
- Year
- 2003
- Author
- X. Yu, C. Zhu, H. Hu, A. Chin, M. F. Li, B. J. Cho, D. L. Kwong, P. D. Foo, and M. B. Yu,
- Conference
- MRS Spring meeting
X. Yu, C. Zhu, H. Hu, A. Chin, M. F. Li, B. J. Cho, D. L. Kwong, P. D. Foo, and M. B. Yu, "MIM capacitors with HfO2 and HfAlOx for Si RF and analog applications", MRS Spring meeting, CA, USA, May 2003.
May 2003.
CA, USA