Growth and characterization of hafnium oxide thin films prepared by MOCVD
- Year
- 2003
- Author
- C. S. Fong, V. L. S. Wei, R. G. Krishnam, A. Trigg, L. K. Bera, S. Mathew, N. Balasubramanian, M. S. Joo, C. C. Yeo, and B. J. Cho
- Conference
- 2003 International conference on Characterisation and Metrology for ULSI technology
C. S. Fong, V. L. S. Wei, R. G. Krishnam, A. Trigg, L. K. Bera, S. Mathew, N. Balasubramanian, M. S. Joo, C. C. Yeo, and B. J. Cho, "Growth and characterization of hafnium oxide thin films prepared by MOCVD", 2003 International conference on Characterisation and Metrology for ULSI technology, Austin, USA, March 2003, AIP Conference Proceedings No. 683, pp. 176-180, AIP.
March 2003,
Austin, USA
