Material and electrical characterization of HfO2 films for MIM capacitors applications
- Year
- 2003
- Author
- H.Hu, C. Zhu, Y. F. Lu, J. N. Zeng, Y. H. Wu, Y. F. Liew, M. F. Li, B. J. Cho, W. K. Choi
- Conference
- MRS Spring meeting,
H.Hu, C. Zhu, Y. F. Lu, J. N. Zeng, Y. H. Wu, Y. F. Liew, M. F. Li, B. J. Cho, W. K. Choi, "Material and electrical characterization of HfO2 films for MIM capacitors applications", MRS Spring meeting, April 2003, USA.
April 2003
USA.