Silicon nanostructured films formed by pulsed-laser deposition in inert gas and reactive gas
- Year
- 2003
- Author
- X. Y. Chen, Y. F. Lu, Y. H. Wu, B. J. Cho, H. Hu
- Conference
- MRS Symposium Proceedings Vol. 762
X. Y. Chen, Y. F. Lu, Y. H. Wu, B. J. Cho, H. Hu, "Silicon nanostructured films formed by pulsed-laser deposition in inert gas and reactive gas", MRS Symposium Proceedings Vol. 762, April 2003, pp. A19.2.1CA, USA.
April 2003
USA.