Process optimization for multiple-pulse laser annealing of boron implanted silicon with germanium pre-amorphization
- Year
- 2003
- Author
- D.Poon, B. J. Cho, Y. F. Lu, M. Bhat, and A. See
- Conference
- 2003 MRS Spring Meeting, MRS Symposium D: CMOS Front-End Materials and Process Technology
D.Poon, B. J. Cho, Y. F. Lu, M. Bhat, and A. See, "Process optimization for multiple-pulse laser annealing of boron implanted silicon with germanium pre-amorphization", 2003 MRS Spring Meeting, MRS Symposium D: CMOS Front-End Materials and Process Technology, CA, USA, May 2003.
May 2003.
CA, USA