New Substrate Platform for Metal-Gate/High-k Gate Dielectric MOSFET Integration and RF Technology up to 100 GHz
- Year
- 2003
- Author
- A. Chin, P. Mei, C. Zhu, M.-F. Li, S. Lee, W. J. Yoo, B. J. Cho and D. L. Kwong
- Conference
- Advanced Crystal Growth Conference and 2003 International Symposium on Substrate Engineering
A. Chin, P. Mei, C. Zhu, M.-F. Li, S. Lee, W. J. Yoo, B. J. Cho and D. L. Kwong, "New Substrate Platform for Metal-Gate/High-k Gate Dielectric MOSFET Integration and RF Technology up to 100 GHz", Advanced Crystal Growth Conference and 2003 International Symposium on Substrate Engineering / Nano SOI Technology for Advanced Semiconductor Devices, November 2003, Korea. (Invited).
November 2003
Korea
