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New Substrate Platform for Metal-Gate/High-k Gate Dielectric MOSFET Integration and RF Technology up to 100 GHz 
Year
2003 
Author
A. Chin, P. Mei, C. Zhu, M.-F. Li, S. Lee, W. J. Yoo, B. J. Cho and D. L. Kwong 
Conference
Advanced Crystal Growth Conference and 2003 International Symposium on Substrate Engineering 

A. Chin, P. Mei, C. Zhu, M.-F. Li, S. Lee, W. J. Yoo, B. J. Cho and D. L. Kwong, "New Substrate Platform for Metal-Gate/High-k Gate Dielectric MOSFET Integration and RF Technology up to 100 GHz", Advanced Crystal Growth Conference and 2003 International Symposium on Substrate Engineering / Nano SOI Technology for Advanced Semiconductor Devices, November 2003, Korea. (Invited).


November 2003
Korea