MOCVD HfAlxOy gate dielectrics deposited using single cocktail liquid source
- Year
- 2003
- Author
- M. S. Joo, B. J. Cho, C. C. Yeo, S. J. Whoang, S. Matthew, L. K. Bera, N. Balasubramanian, and D. L. Kwong
- Conference
- 2003 International Conf. on Solid State Devices and Materials (SSDM), The Japan Society of Applied Physics
M. S. Joo, B. J. Cho, C. C. Yeo, S. J. Whoang, S. Matthew, L. K. Bera, N. Balasubramanian, and D. L. Kwong, "MOCVD HfAlxOy gate dielectrics deposited using single cocktail liquid source", 2003 International Conf. on Solid State Devices and Materials (SSDM), The Japan Society of Applied Physics, Japan, Sept. 2003.
Sept. 2003.
Japan