Progressive breakdown statistics in ultra-thin silicon dioxides
- Year
- 2003
- Author
- W. Y. Loh, B. J. Cho, M. F. Li, Daniel S. H. Chan, C. H. Ang, Z. J. Zhen, and D. L. Kwong
- Conference
- 10th International Symp. on the Physical and Failure Analysis of Integrated Circuits (IPFA)
W. Y. Loh, B. J. Cho, M. F. Li, Daniel S. H. Chan, C. H. Ang, Z. J. Zhen, and D. L. Kwong, "Progressive breakdown statistics in ultra-thin silicon dioxides", Proceedings of 10th International Symp. on the Physical and Failure Analysis of Integrated Circuits (IPFA), pp. 157, Singapore, July 2003.
July 2003.
Singapore