New reliability issues of CMOS transistors with 1.3 nm gate oxide
- Year
- 2003
- Author
- M. F. Li, B. J. Cho, G. Chen, W. Y. Loh, D. L. Kwong
- Conference
- 7th International Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
M. F. Li, B. J. Cho, G. Chen, W. Y. Loh, D. L. Kwong, "New reliability issues of CMOS transistors with 1.3 nm gate oxide", 7th International Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, April 2003, Paris, France. (Invited).
April 2003
Paris, France. (Invited)