Wet etching characteristics and surface morphology evaluation of MOCVD grown HfO2 film
- Year
- 2003
- Author
- M.Balasubramanian, L. K. Bera, S. Mathew, V. Lim, M. S. Joo, and B. J. Cho
- Conference
- 2nd International Conference on Materials for Advanced Technologies
M.Balasubramanian, L. K. Bera, S. Mathew, V. Lim, M. S. Joo, and B. J. Cho, "Wet etching characteristics and surface morphology evaluation of MOCVD grown HfO2 film", 2nd International Conference on Materials for Advanced Technologies, p. 532, MRS Singapore, December 2003.
December 2003.
MRS Singapore