Laser microprocessing in microelectronics, data storage, and photonics
- Year
- 2002
- Author
- Yongfeng Lu, Wen D Song, ZhongMin Ren, Chengwu An, DaMing Liu, Sumei Huang, Weijie Wang, Ming Hui Hong, Tow Chong Chong, BJ Cho, JiNan Zeng, CF Tan
- Conference
- International Symposium on High-Power Laser Ablation 2002, pp211-222
Yongfeng Lu, Wen D Song, ZhongMin Ren, Chengwu An, DaMing Liu, Sumei Huang, Weijie Wang, Ming Hui Hong, Tow Chong Chong, BJ Cho, JiNan Zeng, CF Tan, "Laser microprocessing in microelectronics, data storage, and photonics", International Symposium on High-Power Laser Ablation 2002, pp211-222, Sep. 2002.
Sep. 2002.