Voltage and temperature dependence of capacitance of high-K hfO2 MIM capacitors: A unified understanding and prediction
- Year
- 2003
- Author
- C. Zhu, H. Hu, X. F. Yang, S. J. Kim, A. Chin, M. F. Li, B. J. Cho, D. L. Kwong
- Conference
- International Electron Device Meeting (IEDM)
C. Zhu, H. Hu, X. F. Yang, S. J. Kim, A. Chin, M. F. Li, B. J. Cho, D. L. Kwong, "Voltage and temperature dependence of capacitance of high-K hfO2 MIM capacitors: A unified understanding and prediction", International Electron Device Meeting (IEDM), Dec., 2003, Washington, USA.
Dec., 2003
Washington, USA.