Effects of Cu diffusion on MOSFET electrical properties
- Year
- 2001
- Author
- C. Zhu, W. J. Yoo, D. P. P. Tan, S. Y. Lim, and B. J. Cho,
- Conference
- 18th InternationalVLSI Multilevel Interconnection Conf. (VMIC)
C. Zhu, W. J. Yoo, D. P. P. Tan, S. Y. Lim, and B. J. Cho, "Effects of Cu diffusion on MOSFET electrical properties", 18th InternationalVLSI Multilevel Interconnection Conf. (VMIC), Santa Clara, November 2001.
November 2001.
Santa Clara