A study of quasi-breakdown mechanism in ultra thin gate oxide under various types of stress
- Year
- 1999
- Author
- H. Guan, Z. Xu, B. J. Cho, M. F. Li, and Y. D. He,
- Conference
- Materials Research Society (MRS) 1999 Fall Meeting Symp
H. Guan, Z. Xu, B. J. Cho, M. F. Li, and Y. D. He, "A study of quasi-breakdown mechanism in ultra thin gate oxide under various types of stress", Materials Research Society (MRS) 1999 Fall Meeting Symp. Proc., New Hampshire, USA, Nov. 1999.
Nov. 1999.
New Hampshire, USA