Investigation of the gate oxide integrity of the nitrided gate oxide using nitrogen implantation into polysilicon gate
- Year
- 1998
- Author
- L. H. Ko, B. J. Cho, Y. A. Nga, and L. H. Chan
- Conference
- Asia-Pacific SIA'98 Conference
- Page
- pp. Mi-P-18
L. H. Ko, B. J. Cho, Y. A. Nga, and L. H. Chan, "Investigation of the gate oxide integrity of the nitrided gate oxide using nitrogen implantation into polysilicon gate", Abstract Proc. of the Asia-Pacific SIA'98 Conf., pp. Mi-P-18, Singapore, Nov. 1998.