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Total 378건 25 페이지

1997
18

"Effect of additional low temperature RTA on ultra-shallow p+-n junction formation" K. H. Lee, J. G. Oh, B. J. Cho, and J. C. Kim, 11th International Conf. on Ion Implantation Technology, 1997
1996
17

"Sidewall-sealed double LOCOS isolation structure with defect-free isolation recess" Y. B. Kim, S. A. Jang, B. J. Cho, and J. C. Kim, 43rd Spring Meeting of the Japan Society of Applied Physics and Related Societies, 1996
16

"Formation of ultra-shallow junction by point defect engineering" K. H. Lee, Y. S. Sohn, J. G. Oh, B. J. Cho, and J. C. Kim, Ion Implantation Conf., Scottsdale, 1996
15

"Effect of Ti deposition temperature on TiSi2 orientation and its thermal instability in heavility doped Si" B. H. Park, S. H. Yu, B. J. Cho, and J. C. Kim, Proc. of 1996 Spring Meeting of Materials Research Society of Korea, 1996
14

"Double spacer LOCOS process with shallow recess of silicon for 0.20 um isolation" B. J. Cho, S. A. Jang, T. S. Song, S. H. Pyi, and J. C. Kim, 1996 International Conf. on Solid State Devices and Materials (SSDM), 1996
13

"3-D adaptive simulation of thermal oxidation process" S. H. Yoon, J. H. Lee, T. Y. Won, B. J. Cho, J. C. Kim, and D. H. Lee, Proc. of the 26th European Solid State Device Research Conf. (ESSDERC), 1996
1995
12

"Novel oxynitridation technology for highly reliable thin dielectrics" M. S. Joo, S. H. Lee, S. K. Lee, B. J. Cho, J. C. KIm, and S. H. Choi, 1995 Symposium on VLSI Technology Digest of Technical Papers, 1995
1994
11

"New breakdown mechanism of ultra thin gate oxides under ballistic transport" S. H. Lee, M. S. Joo, B. J. Cho, Y. J. Park, and J. C. Kim, 1st Korean Semiconductor Tech. Symp., pp. 179, 1994
10

"Effect of in-situ P doped polysilicon on gate oxide (II) - Process condition dependence" J. U. Lim, B. J. Cho, Y. J. Park, J. C. Kim, and S. H. Choi, 41st Spring Meeting of the Japan Society of Applied Physics and Related Societies, 1994
9

"Effect of in-situ P doped polysilicon on gate oxide (I) - yield degradation" J. U. Lim, B. J. Cho, Y. J. Park, J. C. Kim, and S. H. Choi, 41st Spring Meeting of the Japan Society of Applied Physics and Related Societies, 1994
8

"Very light nitridation of thin gate oxide in low pressure N2O" M. S. Joo, S. H. Lee, B. J. Cho, J. C. Kim, and S. H. Choi, 3rd Symp. on Silicon Nitride and Silicon Dioxide Thin Insulation Films, 1994
7

"Quasi-breakdown of ultra thin gate oxide under high field stress" S. H. Lee, B. J. Cho, J. C. Kim, and S. H. Choi, IEEE International Electron Devices Meeting (IEDM) Technical Digest, 1994
1993
6

"Evaluation of a vertical tube concept for RTP" B. J. Cho, P. Vandenabeele, and K. Maex, Materials Research Society (MRS) Symp., 1993
1991
5

"Interpretation of rapid thermal diffusion of phosphorus into silicon" B. J. Cho and C. K. Kim, Semiconductor Workshop for Young Engineers, Kyungju, Korea, 1991
1990
4

"Anomalous diffusion phenomena in two-step rapid thermal diffusion of phosphorus" B. J. Cho and C. K. Kim, Rapid Thermal and Related Processing Techniques, 1990

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