3-D adaptive simulation of thermal oxidation process
- Year
- 1996
- Author
- S. H. Yoon, J. H. Lee, T. Y. Won, B. J. Cho, J. C. Kim, and D. H. Lee
- Conference
- Proc. of the 26th European Solid State Device Research Conf. (ESSDERC)
S. H. Yoon, J. H. Lee, T. Y. Won, B. J. Cho, J. C. Kim, and D. H. Lee, "3-D adaptive simulation of thermal oxidation process", Proc. of the 26th European Solid State Device Research Conf. (ESSDERC), pp. 351, Bologna, Italy, Sep. 1996.
Sep. 1996.
Bologna, Italy