Formation of ultra-shallow junction by point defect engineering
- Year
- 1996
- Author
- K. H. Lee, Y. S. Sohn, J. G. Oh, B. J. Cho, and J. C. Kim
- Conference
- Ion Implantation Conf., Scottsdale
K. H. Lee, Y. S. Sohn, J. G. Oh, B. J. Cho, and J. C. Kim, "Formation of ultra-shallow junction by point defect engineering", Ion Implantation Conf., Scottsdale, USA, April 1996. (Invited).
April 1996.
USA