Sidewall-sealed double LOCOS isolation structure with defect-free isolation recess
- Year
- 1996
- Author
- Y. B. Kim, S. A. Jang, B. J. Cho, and J. C. Kim
- Conference
- 43rd Spring Meeting of the Japan Society of Applied Physics and Related Societies
Y. B. Kim, S. A. Jang, B. J. Cho, and J. C. Kim, "Sidewall-sealed double LOCOS isolation structure with defect-free isolation recess", Extended Abstract of the 43rd Spring Meeting of the Japan Society of Applied Physics and Related Societies, pp. 730, Tokyo, Japan, March 1996.
March 1996.
Tokyo, Japan