Very light nitridation of thin gate oxide in low pressure N2O
- Year
- 1994
- Author
- M. S. Joo, S. H. Lee, B. J. Cho, J. C. Kim, and S. H. Choi
- Conference
- 3rd Symp. on Silicon Nitride and Silicon Dioxide Thin Insulation Films
M. S. Joo, S. H. Lee, B. J. Cho, J. C. Kim, and S. H. Choi, "Very light nitridation of thin gate oxide in low pressure N2O", Proc. of the 3rd Symp. on Silicon Nitride and Silicon Dioxide Thin Insulation Films, pp. 458, The Electrochemical Society Proceedings. Vol. 94-61, Pennington, USA, May 1994.
May 1994.
Pennington, USA