Evaluation of a vertical tube concept for RTP
- Year
- 1993
- Author
- B. J. Cho, P. Vandenabeele, and K. Maex
- Conference
- Materials Research Society (MRS) Symp.
B. J. Cho, P. Vandenabeele, and K. Maex, "Evaluation of a vertical tube concept for RTP", Materials Research Society (MRS) Symp. Proc.,Vol. 303, pp. 165, San Francisco, MRS, April 1993.
April 1993.
San Francisco