Anomalous diffusion phenomena in two-step rapid thermal diffusion of phosphorus
- Year
- 1990
- Author
- B. J. Cho and C. K. Kim
- Conference
- Rapid Thermal and Related Processing Techniques
B. J. Cho and C. K. Kim, "Anomalous diffusion phenomena in two-step rapid thermal diffusion of phosphorus", Rapid Thermal and Related Processing Techniques, pp. 180, SPIE, Vol. 1393, Santa Clara, USA, Oct. 1990.
Oct. 1990
Santa Clara, USA,