Wafer temperature simulation and control algorithm in RTA system
- Year
- 1987
- Author
- B. J. Cho, K. T. Kim, and C. K. Kim
- Conference
- Conf. on CAD, Semiconductor Material and Components
B. J. Cho, K. T. Kim, and C. K. Kim, "Wafer temperature simulation and control algorithm in RTA system", Conf. on CAD, Semiconductor Material and Components, pp. 73, KITE, Soeul, Korea, May 1987.
May 1987.
Seoul, Korea