Experimental results of a prototype rapid thermal annealing system
- Year
- 1986
- Author
- B. J. Cho, K. T. Kim, and C. K. Kim
- Conference
- Conf. on CAD, Semiconductor Material and Components, KITE, Suwon, Korea
- Page
- pp. 71
B. J. Cho, K. T. Kim, and C. K. Kim, "Experimental results of a prototype rapid thermal annealing system", Conf. on CAD, Semiconductor Material and Components, pp. 71, KITE, Suwon, Korea, May 1986.