Conformal, Wafer-Scale and Controlled Nanoscale Doping of Semiconductors Via the iCVD Process
- Year
- 2018
- Author
- Jae Hwan Kim, Hong Keun Park, Kwan Yong Pak, Alex Yoon, Yun Sang Kim, Sung Gap Im, Wan Sik Hwang, and Byung Jin Cho
- Conference
- 2018 IEEE International Electron Devices Meeting (IEDM 2018)
- File
- figure 3.png (256.4K) 0회 다운로드 DATE : 2019-04-09 17:15:30
Jae Hwan Kim, Hong Keun Park, Kwan Yong Pak, Alex Yoon, Yun Sang Kim, Sung Gap Im, Wan Sik Hwang, and Byung Jin Cho, "Conformal, Wafer-Scale and Controlled Nanoscale Doping of Semiconductors Via the iCVD Process", 2018 IEEE International Electron Devices Meeting, San Francisco, USA, December 1-5, 2018.
December 1-5, 2018.
San Francisco, USA
