Graphene based Cu diffusion barrier
- Year
- 2017
- Author
- Jae Hwan Kim, Seong Jun Yoon, Jae Hoon Bong, Alexander Yoon and Byung Jin Cho
- Conference
- 24th Korean Conference on Semiconductors
Jae Hwan Kim, Seong Jun Yoon, Jae Hoon Bong, Alexander Yoon and Byung Jin Cho, "Graphene based Cu diffusion barrier", 24th Korean Conference on Semiconductors, Kangwondo, Korea, Feb. 13-15, 2017
Feb. 13-15, 2017
Kangwondo, Korea