Work Function Tuning of Titanium Nitride Gate Electrode Employing Atomic Layer Deposition for PMOS Devices
- Year
- 2017
- Author
- Jungmin Moon , Hyun Jun Ahn , Il Cheol Rho , Choon Hwan Kim, and Byung Jin Cho
- Conference
- 24th Korean Conference on Semiconductors
Jungmin Moon , Hyun Jun Ahn , Il Cheol Rho , Choon Hwan Kim, and Byung Jin Cho, "Work Function Tuning of Titanium Nitride Gate Electrode Employing Atomic Layer Deposition for PMOS Devices" 24th Korean Conference on Semiconductors, Kangwondo, Korea, Feb. 13-15, 2017
Feb. 13-15, 2017
Kangwondo, Korea