p+ n shallow junction formation from BN source using RTP
- Year
- 1987
- Author
- K. T. Kim, B. J. Cho, and C. K. Kim
- Conference
- CAD, Semiconductor Material and Components
K. T. Kim, B. J. Cho, and C. K. Kim, "p+ n shallow junction formation from BN source using RTP", Conf. on CAD, Semiconductor Material and Components, pp. 77, KITE, Soeul, Korea, May 1987.
May 1987.
KITE, Soeul, Korea