Novel oxynitridation technology for highly reliable thin dielectrics
- Year
- 1995
- Author
- M. S. Joo, S. H. Lee, S. K. Lee, B. J. Cho, J. C. KIm, and S. H. Choi
- Conference
- 1995 Symposium on VLSI Technology Digest of Technical Papers
M. S. Joo, S. H. Lee, S. K. Lee, B. J. Cho, J. C. KIm, and S. H. Choi, "Novel oxynitridation technology for highly reliable thin dielectrics", 1995 Symposium on VLSI Technology Digest of Technical Papers, pp. 107, IEEE, Kyoto, Japan, May 1995.
May 1995
Kyoto, Japan