Investigation of quasi-breakdown mechanism in ultrathin gate oxides
- Year
- 1999
- Author
- Y. D. He, H. Guan, M. F. Li, B. J. Cho, and Z. Dong
- Conference
- Materials Research Society (MRS) 1999 Fall Meeting Symp. Proc
Y. D. He, H. Guan, M. F. Li, B. J. Cho, and Z. Dong, "Investigation of quasi-breakdown mechanism in ultrathin gate oxides", Materials Research Society (MRS) 1999 Fall Meeting Symp. Proc., New Hampshire, USA, Nov. 1999.
Nov. 1999.
New Hampshire, USA