Gate oxide reliability concern associated with X-ray lithography
- Year
- 2000
- Author
- B. J. Cho, S. J. Kim, C. H. Ang, C. H. Ling, M. S. Joo, and I. S. Yeo
- Conference
- Extended Abstract of the 200 International Conf. on Solid State Devices and Materials (SSDM)
B. J. Cho, S. J. Kim, C. H. Ang, C. H. Ling, M. S. Joo, and I. S. Yeo, "Gate oxide reliability concern associated with X-ray lithography", Extended Abstract of the 200 International Conf. on Solid State Devices and Materials (SSDM), pp. 250, The Japan Society of Applied Physics, Sendai, Japan, Aug. 2000.
Aug. 2000.
Japan
