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Total 4건
1 페이지
2001
4
"Effect of electron-beam lithography on thin gate oxide reliability"
P. F. Chong, B. J. Cho, E. F. Chor, and M. S. Joo,
8th International Symp. on the Physical and Failure Analysis of Integrated Circuits (IPFA),
2001
3
"Bipolar current stressing and electrical recovery of quasi-breakdown in thin gate oxides"
W. Y. Loh, B. J. Cho, M. F. Li, and Z. Xu,
8th International Symp. on the Physical and Failure Analysis of Integrated Circuits (IPFA),
2001
2
"Effects of Cu diffusion on MOSFET electrical properties"
C. Zhu, W. J. Yoo, D. P. P. Tan, S. Y. Lim, and B. J. Cho,,
18th InternationalVLSI Multilevel Interconnection Conf. (VMIC),
2001
1
"Comparison Study between Stepper and Scanner for gate CD Control Using Total Process-Proximity-based Correction"
Byung-Ho Nam, Dong-Seok Kim, Byung-Jin Cho, Nam-Ki Seok, Jae K Jeong, Sang-Pye Kim, Sang-Woo Kang, Young J Hwang, Young Jin Song,
Photomask Technology, pp793-800,
2001
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