Comparison Study between Stepper and Scanner for gate CD Control Using Total Process-Proximity-based Correction
- Year
- 2001
- Author
- Byung-Ho Nam, Dong-Seok Kim, Byung-Jin Cho, Nam-Ki Seok, Jae K Jeong, Sang-Pye Kim, Sang-Woo Kang, Young J Hwang, Young Jin Song
- Conference
- Photomask Technology, pp793-800
Byung-Ho Nam, Dong-Seok Kim, Byung-Jin Cho, Nam-Ki Seok, Jae K Jeong, Sang-Pye Kim, Sang-Woo Kang, Young J Hwang, Young Jin Song, "Comparison Study between Stepper and Scanner for gate CD Control Using Total Process-Proximity-based Correction", Photomask Technology, pp793-800, Jan. 2001.
Jan. 2001.