Correlation between interface traps and gate laeakage in ultra-thin silicon dioxide (20A)
- Year
- 2002
- Author
- W. Y. Loh, B. J. Cho, M. F. Li, C. M. Lek, Y. F. Yong and M. S. Joo
- Conference
- 9th International Symp. on the Physical and Failure Analysis of Integrated Circuits (IPFA)
W. Y. Loh, B. J. Cho, M. F. Li, C. M. Lek, Y. F. Yong and M. S. Joo, "Correlation between interface traps and gate laeakage in ultra-thin silicon dioxide (20A)", Proc. of 9th International Symp. on the Physical and Failure Analysis of Integrated Circuits (IPFA), pp. 246, Singapore, July 2002.
July 2002.
Singapore