Electrical Properties of CMOS Devices with Cu Local Interconnects
- Year
- 2002
- Author
- H.Xie, W. J. Yoo, C. Zhu, S. Y. Lim, D. Tan, B. J. Cho, and D. Lai
- Conference
- 8th International Conference on Dielectrics & Conductors for ULSI Multilevel Interconnection (DCMIC)
H.Xie, W. J. Yoo, C. Zhu, S. Y. Lim, D. Tan, B. J. Cho, and D. Lai, "Electrical Properties of CMOS Devices with Cu Local Interconnects", 8th International Conference on Dielectrics & Conductors for ULSI Multilevel Interconnection (DCMIC), USA, February 2002.
February 2002.
USA