Effect of annealing on the composition and structure of HfO2 and nitrogen incorporated HfO2
- Year
- 2003
- Author
- C. C. Yeo, B. J. Cho, M. S. Joo, S. J. Whang, D. L. Kwong, L. K. Bera, S. Mathew, N. Balasubramanian
- Conference
- 2nd International Conference on Materials for Advanced Technologies
C. C. Yeo, B. J. Cho, M. S. Joo, S. J. Whang, D. L. Kwong, L. K. Bera, S. Mathew, N. Balasubramanian, "Effect of annealing on the composition and structure of HfO2 and nitrogen incorporated HfO2", 2nd International Conference on Materials for Advanced Technologies, p. 513, MRS Singapore, December 2003.
December 2003
MRS Singapore