A comparative study of multiple and single pulse laser annealing for ultrashallow boron junction formation
- Year
- 2003
- Author
- D.Poon, B. J. Cho, Y. F. Lu, M. Bhat, and A. See,
- Conference
- Ultra-Shallow Junctions-2003 Workshop,
D.Poon, B. J. Cho, Y. F. Lu, M. Bhat, and A. See, "A comparative study of multiple and single pulse laser annealing for ultrashallow boron junction formation", Ultra-Shallow Junctions-2003 Workshop, April 27 - May 1, 2003, Santa Cruz, California, USA.
April 27 - May 1, 2003
Santa Cruz, California, USA.