A comparison study of high-density MIM capacitors with ALD HfO2-Al2O3 laminated, sandwiched and stacked dielectrics
- Year
- 2004
- Author
- S. J. Ding, H. Hu, C. Zhu, S. J. Kim, M. F. Li, B. J. Cho, A. Chin, and D. L. Kwong
- Conference
- Internaional Conference on Solid State and Integrated Circuit Technology (ICSICT)
S. J. Ding, H. Hu, C. Zhu, S. J. Kim, M. F. Li, B. J. Cho, A. Chin, and D. L. Kwong, "A comparison study of high-density MIM capacitors with ALD HfO2-Al2O3 laminated, sandwiched and stacked dielectrics", Internaional Conference on Solid State and Integrated Circuit Technology (ICSICT), Beijing, China, 2004.
2004
Beijing, China