Multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization
- Year
- 2004
- Author
- B. J. Cho, D. Poon, L. S. Tan, M. Bhat, A. See
- Conference
- IEEE 4th International Workshop on Junction Technology (IWJT-2004),
B. J. Cho, D. Poon, L. S. Tan, M. Bhat, A. See, "Multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization", IEEE 4th International Workshop on Junction Technology (IWJT-2004), pp. 22-26, Shanghai, China, March 2004. (Invited).
March 2004.
Shanghai, China