Role of Si in Fermi-level pinning phenomena in metal/high-K dielectric gate stack
- Year
- 2005
- Author
- M. S. Joo, B. J. Cho, N. Balasubramanian, and D. L. Kwong
- Conference
- 3rd International Conference on Materials for Advanced Technologies, Symposium H
M. S. Joo, B. J. Cho, N. Balasubramanian, and D. L. Kwong, "Role of Si in Fermi-level pinning phenomena in metal/high-K dielectric gate stack", 3rd International Conference on Materials for Advanced Technologies, Symposium H: Silicon Microelectronics: Processing to Packaging, p. 40, MRS Singapore, July 2005.
July 2005.
MRS Singapore
