Effects of Low Energy Nitrogen Plasma on the Removal of HfSiON
- Year
- 2006
- Author
- W. S. Hwang, W. J. Yoo, B. J. Cho, and D. S. H. Chan
- Conference
- AVS 53rd International Symposium
W. S. Hwang, W. J. Yoo, B. J. Cho, and D. S. H. Chan, "Effects of Low Energy Nitrogen Plasma on the Removal of HfSiON", AVS 53rd International Symposium, San Francisco, November 2006.
November 2006.
San Francisco