Demonstration of Low Vt NMOSFETs Using Thin HfLaO in ALD TiN/HfSiO Gate Stack
- Year
- 2006
- Author
- C. S. Park, S. C. Song, G. Bersuker, H. N. Alshareef, B. S. Ju, P. Majhi, B. H. Lee, R. Jammy, H. K. Park, M. S. Joo, J. Pu, and B. J. Cho
- Conference
- 2006 International Conference on Solid State Devices and Materials (SSDM 2006)
C. S. Park, S. C. Song, G. Bersuker, H. N. Alshareef, B. S. Ju, P. Majhi, B. H. Lee, R. Jammy, H. K. Park, M. S. Joo, J. Pu, and B. J. Cho, "Demonstration of Low Vt NMOSFETs Using Thin HfLaO in ALD TiN/HfSiO Gate Stack", 2006 International Conference on Solid State Devices and Materials (SSDM 2006), Yokohama, Japan, September 2006.
Yokohama, Japan
September 2006