The effect of Ge composition and Si cap thickness on hot carrier reliability of Si/Si1-xGex/Si p-MOSFETs with high-K/metal gate
- Year
- 2008
- Author
- W.-Y.Loh, P.Majhi, S.-H.Lee,J.-W.Oh, B.Sassman, C.Young, G.Bersuker, B.J.Cho, C.-S.Park, C.-Y.Kang, P.Kirsch, B.-H.Lee, H.R.Harris, H.-H.Tseng, R.Jammy
- Conference
- 2008 Symposium on VLSI Technology
W.-Y.Loh, P.Majhi, S.-H.Lee,J.-W.Oh, B.Sassman, C.Young, G.Bersuker, B.J.Cho, C.-S.Park, C.-Y.Kang, P.Kirsch, B.-H.Lee, H.R.Harris, H.-H.Tseng, R.Jammy, "The effect of Ge composition and Si cap thickness on hot carrier reliability of Si/Si1-xGex/Si p-MOSFETs with high-K/metal gate", 2008 Symposium on VLSI Technology, pp56-57, Honolulu, USA, Jun., 2008.
Jun., 2008.
Honolulu, USA
