ALD of HfLaO and AlLaO for Flash Memory Device Application
- Year
- 2008
- Author
- B. J. Cho and W. He
- Conference
- The 4th Korean ALD Workshop
B. J. Cho and W. He, “ALD of HfLaO and AlLaO for Flash Memory Device Application”, Proceedings on The 4th Korean ALD Workshop, pp. 99 - 115, Seoul, Korea, May., 2008 (Invited).
May., 2008
Seoul, Korea