Enhancement of Dielectric Constant of HfO2 by Lanthanum Incorporation and Crystallization", ,
- Year
- 2009
- Author
- Wei He, Daniel S.H. Chan, and B.J.Cho
- Conference
- 16th Korean Conference on Semiconductors
Wei He, Daniel S.H. Chan, and B.J.Cho, "Enhancement of Dielectric Constant of HfO2 by Lanthanum Incorporation and Crystallization", 16th Korean Conference on Semiconductors, Daejeon, Korea, Fab., 2009.
Feb., 2009.
Daejeon, Korea