Seeding ALD of high-k gate dielectric in CVD graphene FETs for enhanced device performance and reliability
- Year
- 2012
- Author
- Woo Cheol Shin, Byung Jin Cho
- Conference
- Graphene Week 2012
Woo Cheol Shin, Byung Jin Cho, “Seeding ALD of high-k gate dielectric in CVD graphene FETs for enhanced device performance and reliability”, Graphene Week 2012, Delft, Netherlands, June 4-8, 2012.
June 4-8, 2012.
Delft, Netherlands