Graphene as an Ultrathin Diffusion Barrier for Advanced Cu Metallization
- Year
- 2015
- Author
- Jae Hoon Bong, Seong Jun Yoon, Alexander Yoon, Wan Sik Hwang and Byung Jin Cho
- Conference
- Graphene Week 2015
Jae Hoon Bong, Seong Jun Yoon, Alexander Yoon, Wan Sik Hwang and Byung Jin Cho, "Graphene as an Ultrathin Diffusion Barrier for Advanced Cu Metallization", Graphene Week 2015, Manchester, England, June 22-26, 2015.
June 22-26, 2015
Manchester, England