Diffusion Barrier Property of an Ultrathin Graphene Layer for Advanced Cu Interconnect Technology
- Year
- 2015
- Author
- Jae Hoon Bong, Seong Jun Yoon, Alexander Yoon, Wan Sik Hwang and Byung Jin Cho, "
- Conference
- The 2nd Korean Graphene Symposium
Jae Hoon Bong, Seong Jun Yoon, Alexander Yoon, Wan Sik Hwang and Byung Jin Cho, "Diffusion Barrier Property of an Ultrathin Graphene Layer for Advanced Cu Interconnect Technology", The 2nd Korean Graphene Symposium, Buyeo, Korea, March 26-27, 2015.
March 26-27, 2015.
Buyeo, Korea