Reduced Interface Diffusion of Cu Interconnects by Graphene-Based Capping Layer"
- Year
- 2015
- Author
- Seong Jun Yoon, Alexander Yoon, Sung-Yool Choi and Byung Jin Cho
- Conference
- The 2nd Korean Graphene Symposium
Seong Jun Yoon, Alexander Yoon, Sung-Yool Choi and Byung Jin Cho, "Reduced Interface Diffusion of Cu Interconnects by Graphene-Based Capping Layer", The 2nd Korean Graphene Symposium, Buyeo, Korea, March 26-27, 2015.
March 26-27, 2015.
Buyeo, Korea