Investigation of ALD-Ni as P type Work function Metal Electrode on High-k dielectrics
- Year
- 2017
- Author
- Hyun Jun Ahn, Jungmin Moon, Yongjun Kim, Il Cheol Rho, Choon Hwan Kim and Byung Jun Cho
- Conference
- 24th Korean Conference on Semiconductors
Hyun Jun Ahn, Jungmin Moon, Yongjun Kim, Il Cheol Rho, Choon Hwan Kim and Byung Jun Cho, "Investigation of ALD-Ni as P type Work function Metal Electrode on High-k dielectrics", 24th Korean Conference on Semiconductors, Kangwondo, Korea, Feb. 13-15, 2017
Feb. 13-15, 2017
Kangwondo, Korea